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Meso-scale actuator design for the integrated dynamic alignment of a lenslet array within a package

TitleMeso-scale actuator design for the integrated dynamic alignment of a lenslet array within a package
Publication TypeConference Paper
Year of Publication2011
AuthorsWilhelm, S., R. W. Kay, and M. P. Y. Desmulliez
Conference NameDesign, Test, Integration and Packaging of MEMS/MOEMS (DTIP), 2011 Symposium on
Date Published05/2011
Keywordsfocal length, gallium compounds, GaN, III-V semiconductors, integrated dynamic alignment, lenslet array, light emitting diodes, LTCC-process compatible meso-scale actuator, micro-optical components, microactuators, microlens array, microlenses, size 3 mm, size 450 mum, size 5 mm, UV-LED array, wide band gap semiconductors
Abstract

This paper describes the design of an LTCC-process compatible meso-scale actuator for the six degrees of freedom dynamic adjustment of micro-optical components, in particular the alignment of a microlens array on top of a UV-LED array. The lens array is specified to have an active area of 3mm #x00D7; 3mm, the GaN array is 5mm #x00D7; 5mm #x00D7; 450 #x03BC;m. The focal length is 65 #x03BC;m. The actuator must enable the collimation or the focusing of the optical beams emanating from the LED array.