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Enhanced Electroplating of Vias using Megasonic Deposition

Jens Kaufmann, Marc Desmulliez
The Memsa project investigates the electroplating process and introduces enhancement technologies to increase its efficiency [read more]

The Memsa project investigates the electroplating process and introduces enhancement technologies to increase its efficiency, reliability and environmental friendliness. The technology of choice is megasonic enhanced electroplating, which utilizes a high frequency acoustic agitation. This enhancement overcomes the common limitations of agitation near the surface of the substrate and in high aspect ratio microstructures. This will make it possible to fabricate more complex electronics and make some of the electroplating additives redundant.