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MEMS Failure Modes and Reliability Modelling

Suzanne Millar, Marc Desmulliez, Srikanth Lavu
Reliability is the greatest challenge and has been a critical barrier to successful commercialization and wide acceptance of MEMS technology. [read more]

Reliability is the greatest challenge and has been a critical barrier to successful commercialization and wide acceptance of MEMS technology. In this project database has been set up for MEMS failure modes, their mechanisms, acceleration factors and possible mitigate techniques. This serves as first hand knowledge for designers to develop efficient and reliable MEMS. Best practise FMEA methodology has been proposed to determine MEMS failures and, applied on micromotor and MEMS thermal actuator. Failure analysis of MEMS thermal actuators was performed. High level behaviour models were developed to model the environmental (pressure and temperature) influence on a MEMS thermal actuators functional performance and reliability.